JVX7300HRJordan Valley receives repeat orders for its Sub-20nm JVX7300HR Metrology Systems from a Leading Foundry in Asia

MIGDAL HAEMEK, Israel, July 8, 2013 /PRNewswire/ --

Jordan Valley, a leading supplier of X-ray based in-line metrology systems for advanced semiconductor manufacturers, today announced that it received repeat orders for its new JVX7300HR front-end-of-line strain & thin films metrology system from a leading foundry in Asia.

The JVX7300HR system provides in-line, first principle metrology solution for advanced epi (SiGe, Si:C, strain, FinFET) and HKMG (HfO, TiN, TaN) stack analysis for 20 nm (nanometer) and below technology nodes. The JVX7300HR supersedes the JVX7200HR (Best-of-West 2010 award winner) with added capabilities and significant productivity improvements. The company noted that the systems were ordered after successful evaluation of the technology in multiple production sites last year.

Isaac Mazor, Jordan Valley's CEO said: "We are pleased to have been selected by our long-standing customer to support their sub 20nm node FEOL process metrology. This selection represents the customer's confidence in Jordan Valley's ability to provide valuable metrology solutions for their demanding applications, trusting the first-principle X-ray based metrology to provide process control that is superior to the traditional optical metrology".  

Advanced technology nodes set new metrology challenges and requirements for advanced process elements such as epi and high-k/metal gate stacks used to enhance the performance of planar and FinFET transistors.

The JVX7300HR provides new capabilities, including XRR/HRXRD hybrid metrology, significantly improved  productivity, the ability to measure on patterned wafers, and more."By choosing the JVX7300HR platform, the customer acknowledged the product robustness, performance and extendibility to future technology nodes. We believe that the JVX7300HR can be a strong contributor to assure high yield in the current and next generation process nodes, especially for logic and foundry players”. Concluded Isaac Mazor.

About the JVX7300HR production metrology tool
The JVX7300HR is a production worthy X-ray metrology tool combining XRR and HRXRD channels. The tool targets 20nm and below FEOL applications. The tool is configured for full fab automation and is SEMI S2/S8 and CE certified.

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